7/2/2012	8:07:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/2/2012	8:07:53 AM	Recipe started at 8:07 AM
7/2/2012	8:07:53 AM	Helium valve closed
7/2/2012	8:07:53 AM	H2 valve closed
7/2/2012	8:07:53 AM	BCl3 valve closed
7/2/2012	8:07:53 AM	PH3 valve closed
7/2/2012	8:07:53 AM	SiCl4 pre valve closed
7/2/2012	8:07:53 AM	SiCl4 post valve closed
7/2/2012	8:07:53 AM	Main Vac valve closed
7/2/2012	8:07:53 AM	Bypass valve closed
7/2/2012	8:07:53 AM	Bubbler valve closed
7/2/2012	8:07:53 AM	Helium MFC set to  0.000000
7/2/2012	8:07:53 AM	H2 MFC set to  0.000000
7/2/2012	8:07:53 AM	BCl3 MFC set to  0.000000
7/2/2012	8:07:53 AM	PH3 MFC set to  0.000000
7/2/2012	8:07:53 AM	SiCl4 MFC set to  0.000000
7/2/2012	8:07:53 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	8:07:54 AM	Tube furnace set to 0
7/2/2012	8:07:57 AM	H2 valve closed
7/2/2012	8:07:57 AM	BCl3 valve closed
7/2/2012	8:07:57 AM	PH3 valve closed
7/2/2012	8:07:57 AM	SiCl4 pre valve closed
7/2/2012	8:07:57 AM	SiCl4 post valve closed
7/2/2012	8:07:57 AM	Main Vac valve closed
7/2/2012	8:07:57 AM	Bypass valve closed
7/2/2012	8:07:57 AM	Bubbler valve closed
7/2/2012	8:07:57 AM	Helium valve opened
7/2/2012	8:07:57 AM	Helium MFC set to  500.000000
7/2/2012	8:07:57 AM	H2 MFC set to  0.000000
7/2/2012	8:07:57 AM	BCl3 MFC set to  0.000000
7/2/2012	8:07:57 AM	PH3 MFC set to  0.000000
7/2/2012	8:07:57 AM	SiCl4 MFC set to  0.000000
7/2/2012	8:07:57 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	8:07:57 AM	Tube furnace set to 0
7/2/2012	8:09:09 AM	Helium valve closed
7/2/2012	8:09:09 AM	H2 valve closed
7/2/2012	8:09:09 AM	BCl3 valve closed
7/2/2012	8:09:09 AM	PH3 valve closed
7/2/2012	8:09:09 AM	SiCl4 pre valve closed
7/2/2012	8:09:09 AM	SiCl4 post valve closed
7/2/2012	8:09:09 AM	Main Vac valve closed
7/2/2012	8:09:09 AM	Bypass valve closed
7/2/2012	8:09:09 AM	Bubbler valve closed
7/2/2012	8:09:09 AM	Helium MFC set to  0.000000
7/2/2012	8:09:09 AM	H2 MFC set to  0.000000
7/2/2012	8:09:09 AM	BCl3 MFC set to  0.000000
7/2/2012	8:09:09 AM	PH3 MFC set to  0.000000
7/2/2012	8:09:09 AM	SiCl4 MFC set to  0.000000
7/2/2012	8:09:09 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	8:09:10 AM	Tube furnace set to 0
7/2/2012	8:09:11 AM	Run finished at 8:09 AM
7/2/2012	8:09:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/2/2012	8:16:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2012	8:16:14 AM	Recipe started at 8:16 AM
7/2/2012	8:16:14 AM	Helium valve closed
7/2/2012	8:16:14 AM	H2 valve closed
7/2/2012	8:16:14 AM	BCl3 valve closed
7/2/2012	8:16:14 AM	PH3 valve closed
7/2/2012	8:16:14 AM	SiCl4 pre valve closed
7/2/2012	8:16:14 AM	SiCl4 post valve closed
7/2/2012	8:16:14 AM	Main Vac valve closed
7/2/2012	8:16:14 AM	Bubbler valve closed
7/2/2012	8:16:14 AM	Bypass valve opened
7/2/2012	8:16:14 AM	Helium MFC set to  0.000000
7/2/2012	8:16:14 AM	H2 MFC set to  0.000000
7/2/2012	8:16:14 AM	BCl3 MFC set to  0.000000
7/2/2012	8:16:14 AM	PH3 MFC set to  0.000000
7/2/2012	8:16:14 AM	SiCl4 MFC set to  0.000000
7/2/2012	8:16:14 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	8:16:14 AM	Tube furnace set to 0
7/2/2012	8:17:25 AM	Helium valve closed
7/2/2012	8:17:25 AM	H2 valve closed
7/2/2012	8:17:25 AM	BCl3 valve closed
7/2/2012	8:17:25 AM	PH3 valve closed
7/2/2012	8:17:25 AM	SiCl4 pre valve closed
7/2/2012	8:17:25 AM	SiCl4 post valve closed
7/2/2012	8:17:25 AM	Main Vac valve closed
7/2/2012	8:17:25 AM	Bubbler valve closed
7/2/2012	8:17:25 AM	Bypass valve opened
7/2/2012	8:17:25 AM	Helium MFC set to  0.000000
7/2/2012	8:17:25 AM	H2 MFC set to  0.000000
7/2/2012	8:17:25 AM	BCl3 MFC set to  0.000000
7/2/2012	8:17:25 AM	PH3 MFC set to  0.000000
7/2/2012	8:17:25 AM	SiCl4 MFC set to  0.000000
7/2/2012	8:17:25 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	8:17:25 AM	Tube furnace set to 0
7/2/2012	8:18:25 AM	Helium valve closed
7/2/2012	8:18:25 AM	H2 valve closed
7/2/2012	8:18:25 AM	BCl3 valve closed
7/2/2012	8:18:25 AM	PH3 valve closed
7/2/2012	8:18:25 AM	SiCl4 pre valve closed
7/2/2012	8:18:25 AM	SiCl4 post valve closed
7/2/2012	8:18:25 AM	Bypass valve closed
7/2/2012	8:18:25 AM	Bubbler valve closed
7/2/2012	8:18:25 AM	Main Vac valve opened
7/2/2012	8:18:25 AM	Helium MFC set to  0.000000
7/2/2012	8:18:25 AM	H2 MFC set to  0.000000
7/2/2012	8:18:25 AM	BCl3 MFC set to  0.000000
7/2/2012	8:18:25 AM	PH3 MFC set to  0.000000
7/2/2012	8:18:25 AM	SiCl4 MFC set to  0.000000
7/2/2012	8:18:25 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	8:18:25 AM	Tube furnace set to 0
7/2/2012	8:18:26 AM	Run finished at 8:18 AM
7/2/2012	8:18:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2012	9:59:17 AM	Main Vac valve closed
7/2/2012	9:59:28 AM	Main Vac valve opened
7/2/2012	10:01:10 AM	Recipe started at 10:01 AM
7/2/2012	10:01:10 AM	Helium valve closed
7/2/2012	10:01:10 AM	H2 valve closed
7/2/2012	10:01:10 AM	BCl3 valve closed
7/2/2012	10:01:10 AM	PH3 valve closed
7/2/2012	10:01:10 AM	SiCl4 pre valve closed
7/2/2012	10:01:10 AM	SiCl4 post valve closed
7/2/2012	10:01:10 AM	Bypass valve closed
7/2/2012	10:01:10 AM	Bubbler valve closed
7/2/2012	10:01:10 AM	Main Vac valve opened
7/2/2012	10:01:10 AM	Helium MFC set to  0.000000
7/2/2012	10:01:10 AM	H2 MFC set to  0.000000
7/2/2012	10:01:10 AM	BCl3 MFC set to  0.000000
7/2/2012	10:01:10 AM	PH3 MFC set to  0.000000
7/2/2012	10:01:10 AM	SiCl4 MFC set to  0.000000
7/2/2012	10:01:10 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	10:01:10 AM	Tube furnace set to 0
7/2/2012	10:01:13 AM	Helium valve closed
7/2/2012	10:01:13 AM	H2 valve closed
7/2/2012	10:01:13 AM	BCl3 valve closed
7/2/2012	10:01:13 AM	PH3 valve closed
7/2/2012	10:01:13 AM	SiCl4 pre valve closed
7/2/2012	10:01:13 AM	SiCl4 post valve closed
7/2/2012	10:01:13 AM	Main Vac valve closed
7/2/2012	10:01:13 AM	Bypass valve closed
7/2/2012	10:01:13 AM	Bubbler valve closed
7/2/2012	10:01:13 AM	Helium MFC set to  0.000000
7/2/2012	10:01:13 AM	H2 MFC set to  0.000000
7/2/2012	10:01:13 AM	BCl3 MFC set to  0.000000
7/2/2012	10:01:13 AM	PH3 MFC set to  0.000000
7/2/2012	10:01:13 AM	SiCl4 MFC set to  0.000000
7/2/2012	10:01:13 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	10:01:14 AM	Tube furnace set to 0
7/2/2012	10:01:17 AM	Helium valve closed
7/2/2012	10:01:17 AM	BCl3 valve closed
7/2/2012	10:01:17 AM	PH3 valve closed
7/2/2012	10:01:17 AM	SiCl4 pre valve closed
7/2/2012	10:01:17 AM	SiCl4 post valve closed
7/2/2012	10:01:17 AM	Main Vac valve closed
7/2/2012	10:01:17 AM	Bypass valve closed
7/2/2012	10:01:17 AM	Bubbler valve closed
7/2/2012	10:01:17 AM	H2 valve opened
7/2/2012	10:01:17 AM	Helium MFC set to  0.000000
7/2/2012	10:01:17 AM	H2 MFC set to  500.000000
7/2/2012	10:01:17 AM	BCl3 MFC set to  0.000000
7/2/2012	10:01:17 AM	PH3 MFC set to  0.000000
7/2/2012	10:01:17 AM	SiCl4 MFC set to  0.000000
7/2/2012	10:01:17 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	10:01:17 AM	Tube furnace set to 0
7/2/2012	10:02:33 AM	Helium valve closed
7/2/2012	10:02:33 AM	BCl3 valve closed
7/2/2012	10:02:33 AM	PH3 valve closed
7/2/2012	10:02:33 AM	SiCl4 pre valve closed
7/2/2012	10:02:33 AM	SiCl4 post valve closed
7/2/2012	10:02:33 AM	Main Vac valve closed
7/2/2012	10:02:33 AM	Bypass valve closed
7/2/2012	10:02:33 AM	H2 valve opened
7/2/2012	10:02:33 AM	Bubbler valve opened
7/2/2012	10:02:33 AM	Helium MFC set to  0.000000
7/2/2012	10:02:33 AM	H2 MFC set to  500.000000
7/2/2012	10:02:33 AM	BCl3 MFC set to  0.000000
7/2/2012	10:02:33 AM	PH3 MFC set to  0.000000
7/2/2012	10:02:33 AM	SiCl4 MFC set to  0.000000
7/2/2012	10:02:33 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	10:02:33 AM	Tube furnace set to 0
7/2/2012	10:02:34 AM	Helium valve closed
7/2/2012	10:02:34 AM	BCl3 valve closed
7/2/2012	10:02:34 AM	PH3 valve closed
7/2/2012	10:02:34 AM	SiCl4 pre valve closed
7/2/2012	10:02:34 AM	SiCl4 post valve closed
7/2/2012	10:02:34 AM	Main Vac valve closed
7/2/2012	10:02:34 AM	Bypass valve closed
7/2/2012	10:02:34 AM	H2 valve opened
7/2/2012	10:02:34 AM	Bubbler valve opened
7/2/2012	10:02:34 AM	Helium MFC set to  0.000000
7/2/2012	10:02:34 AM	H2 MFC set to  500.000000
7/2/2012	10:02:34 AM	BCl3 MFC set to  0.000000
7/2/2012	10:02:34 AM	PH3 MFC set to  0.000000
7/2/2012	10:02:34 AM	SiCl4 MFC set to  0.000000
7/2/2012	10:02:34 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	10:02:34 AM	Tube furnace set to 1000
7/2/2012	10:27:34 AM	Helium valve closed
7/2/2012	10:27:34 AM	PH3 valve closed
7/2/2012	10:27:34 AM	Main Vac valve closed
7/2/2012	10:27:34 AM	Bypass valve closed
7/2/2012	10:27:34 AM	H2 valve opened
7/2/2012	10:27:34 AM	BCl3 valve opened
7/2/2012	10:27:34 AM	SiCl4 pre valve opened
7/2/2012	10:27:34 AM	SiCl4 post valve opened
7/2/2012	10:27:34 AM	Bubbler valve opened
7/2/2012	10:27:34 AM	Helium MFC set to  0.000000
7/2/2012	10:27:34 AM	H2 MFC set to  450.000000
7/2/2012	10:27:34 AM	BCl3 MFC set to  1.000000
7/2/2012	10:27:34 AM	PH3 MFC set to  0.000000
7/2/2012	10:27:34 AM	SiCl4 MFC set to  50.000000
7/2/2012	10:27:34 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	10:27:34 AM	Tube furnace set to 1000
7/2/2012	10:57:34 AM	Helium valve closed
7/2/2012	10:57:34 AM	BCl3 valve closed
7/2/2012	10:57:34 AM	PH3 valve closed
7/2/2012	10:57:34 AM	SiCl4 pre valve closed
7/2/2012	10:57:34 AM	SiCl4 post valve closed
7/2/2012	10:57:34 AM	Main Vac valve closed
7/2/2012	10:57:34 AM	Bypass valve closed
7/2/2012	10:57:34 AM	H2 valve opened
7/2/2012	10:57:34 AM	Bubbler valve opened
7/2/2012	10:57:34 AM	Helium MFC set to  0.000000
7/2/2012	10:57:34 AM	H2 MFC set to  500.000000
7/2/2012	10:57:34 AM	BCl3 MFC set to  0.000000
7/2/2012	10:57:34 AM	PH3 MFC set to  0.000000
7/2/2012	10:57:34 AM	SiCl4 MFC set to  0.000000
7/2/2012	10:57:34 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	10:57:34 AM	Tube furnace set to 750
7/2/2012	11:12:34 AM	H2 valve closed
7/2/2012	11:12:34 AM	BCl3 valve closed
7/2/2012	11:12:34 AM	PH3 valve closed
7/2/2012	11:12:34 AM	SiCl4 pre valve closed
7/2/2012	11:12:34 AM	SiCl4 post valve closed
7/2/2012	11:12:34 AM	Main Vac valve closed
7/2/2012	11:12:34 AM	Bypass valve closed
7/2/2012	11:12:34 AM	Helium valve opened
7/2/2012	11:12:34 AM	Bubbler valve opened
7/2/2012	11:12:34 AM	Helium MFC set to  500.000000
7/2/2012	11:12:34 AM	H2 MFC set to  0.000000
7/2/2012	11:12:35 AM	BCl3 MFC set to  0.000000
7/2/2012	11:12:35 AM	PH3 MFC set to  0.000000
7/2/2012	11:12:35 AM	SiCl4 MFC set to  0.000000
7/2/2012	11:12:35 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	11:12:35 AM	Tube furnace set to 0
7/2/2012	11:32:35 AM	Helium valve closed
7/2/2012	11:32:35 AM	H2 valve closed
7/2/2012	11:32:35 AM	BCl3 valve closed
7/2/2012	11:32:35 AM	PH3 valve closed
7/2/2012	11:32:35 AM	SiCl4 pre valve closed
7/2/2012	11:32:35 AM	SiCl4 post valve closed
7/2/2012	11:32:35 AM	Main Vac valve closed
7/2/2012	11:32:35 AM	Bypass valve closed
7/2/2012	11:32:35 AM	Bubbler valve closed
7/2/2012	11:32:35 AM	Helium MFC set to  0.000000
7/2/2012	11:32:35 AM	H2 MFC set to  0.000000
7/2/2012	11:32:35 AM	BCl3 MFC set to  0.000000
7/2/2012	11:32:35 AM	PH3 MFC set to  0.000000
7/2/2012	11:32:35 AM	SiCl4 MFC set to  0.000000
7/2/2012	11:32:35 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	11:32:35 AM	Tube furnace set to 0
7/2/2012	11:32:44 AM	Helium valve closed
7/2/2012	11:32:44 AM	H2 valve closed
7/2/2012	11:32:44 AM	BCl3 valve closed
7/2/2012	11:32:44 AM	PH3 valve closed
7/2/2012	11:32:44 AM	SiCl4 pre valve closed
7/2/2012	11:32:44 AM	SiCl4 post valve closed
7/2/2012	11:32:44 AM	Main Vac valve closed
7/2/2012	11:32:44 AM	Bubbler valve closed
7/2/2012	11:32:44 AM	Bypass valve opened
7/2/2012	11:32:44 AM	Helium MFC set to  0.000000
7/2/2012	11:32:44 AM	H2 MFC set to  0.000000
7/2/2012	11:32:44 AM	BCl3 MFC set to  0.000000
7/2/2012	11:32:44 AM	PH3 MFC set to  0.000000
7/2/2012	11:32:44 AM	SiCl4 MFC set to  0.000000
7/2/2012	11:32:44 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	11:32:44 AM	Tube furnace set to 0
7/2/2012	11:33:40 AM	Helium valve closed
7/2/2012	11:33:40 AM	H2 valve closed
7/2/2012	11:33:40 AM	BCl3 valve closed
7/2/2012	11:33:40 AM	PH3 valve closed
7/2/2012	11:33:40 AM	SiCl4 pre valve closed
7/2/2012	11:33:40 AM	SiCl4 post valve closed
7/2/2012	11:33:40 AM	Main Vac valve closed
7/2/2012	11:33:40 AM	Bubbler valve closed
7/2/2012	11:33:40 AM	Bypass valve opened
7/2/2012	11:33:40 AM	Helium MFC set to  0.000000
7/2/2012	11:33:40 AM	H2 MFC set to  0.000000
7/2/2012	11:33:40 AM	BCl3 MFC set to  0.000000
7/2/2012	11:33:40 AM	PH3 MFC set to  0.000000
7/2/2012	11:33:40 AM	SiCl4 MFC set to  0.000000
7/2/2012	11:33:40 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	11:33:40 AM	Tube furnace set to 0
7/2/2012	11:34:40 AM	Helium valve closed
7/2/2012	11:34:40 AM	H2 valve closed
7/2/2012	11:34:40 AM	BCl3 valve closed
7/2/2012	11:34:40 AM	PH3 valve closed
7/2/2012	11:34:40 AM	SiCl4 pre valve closed
7/2/2012	11:34:40 AM	SiCl4 post valve closed
7/2/2012	11:34:40 AM	Bypass valve closed
7/2/2012	11:34:40 AM	Bubbler valve closed
7/2/2012	11:34:40 AM	Main Vac valve opened
7/2/2012	11:34:40 AM	Helium MFC set to  0.000000
7/2/2012	11:34:40 AM	H2 MFC set to  0.000000
7/2/2012	11:34:40 AM	BCl3 MFC set to  0.000000
7/2/2012	11:34:40 AM	PH3 MFC set to  0.000000
7/2/2012	11:34:40 AM	SiCl4 MFC set to  0.000000
7/2/2012	11:34:40 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	11:34:40 AM	Tube furnace set to 0
7/2/2012	11:35:29 AM	Run finished at 11:35 AM
7/2/2012	11:35:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/2/2012	11:35:35 AM	Recipe started at 11:35 AM
7/2/2012	11:35:35 AM	Helium valve closed
7/2/2012	11:35:35 AM	H2 valve closed
7/2/2012	11:35:35 AM	BCl3 valve closed
7/2/2012	11:35:35 AM	PH3 valve closed
7/2/2012	11:35:35 AM	SiCl4 pre valve closed
7/2/2012	11:35:35 AM	SiCl4 post valve closed
7/2/2012	11:35:35 AM	Main Vac valve closed
7/2/2012	11:35:35 AM	Bypass valve closed
7/2/2012	11:35:35 AM	Bubbler valve closed
7/2/2012	11:35:35 AM	Helium MFC set to  0.000000
7/2/2012	11:35:36 AM	H2 MFC set to  0.000000
7/2/2012	11:35:36 AM	BCl3 MFC set to  0.000000
7/2/2012	11:35:36 AM	PH3 MFC set to  0.000000
7/2/2012	11:35:36 AM	SiCl4 MFC set to  0.000000
7/2/2012	11:35:36 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	11:35:36 AM	Tube furnace set to 0
7/2/2012	11:35:39 AM	H2 valve closed
7/2/2012	11:35:39 AM	BCl3 valve closed
7/2/2012	11:35:39 AM	PH3 valve closed
7/2/2012	11:35:39 AM	SiCl4 pre valve closed
7/2/2012	11:35:39 AM	SiCl4 post valve closed
7/2/2012	11:35:39 AM	Main Vac valve closed
7/2/2012	11:35:39 AM	Bypass valve closed
7/2/2012	11:35:39 AM	Bubbler valve closed
7/2/2012	11:35:39 AM	Helium valve opened
7/2/2012	11:35:39 AM	Helium MFC set to  500.000000
7/2/2012	11:35:39 AM	H2 MFC set to  0.000000
7/2/2012	11:35:39 AM	BCl3 MFC set to  0.000000
7/2/2012	11:35:39 AM	PH3 MFC set to  0.000000
7/2/2012	11:35:39 AM	SiCl4 MFC set to  0.000000
7/2/2012	11:35:39 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	11:35:39 AM	Tube furnace set to 0
7/2/2012	11:36:48 AM	Helium valve closed
7/2/2012	11:36:48 AM	H2 valve closed
7/2/2012	11:36:48 AM	BCl3 valve closed
7/2/2012	11:36:48 AM	PH3 valve closed
7/2/2012	11:36:48 AM	SiCl4 pre valve closed
7/2/2012	11:36:48 AM	SiCl4 post valve closed
7/2/2012	11:36:48 AM	Main Vac valve closed
7/2/2012	11:36:48 AM	Bypass valve closed
7/2/2012	11:36:48 AM	Bubbler valve closed
7/2/2012	11:36:48 AM	Helium MFC set to  0.000000
7/2/2012	11:36:48 AM	H2 MFC set to  0.000000
7/2/2012	11:36:48 AM	BCl3 MFC set to  0.000000
7/2/2012	11:36:48 AM	PH3 MFC set to  0.000000
7/2/2012	11:36:48 AM	SiCl4 MFC set to  0.000000
7/2/2012	11:36:48 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	11:36:49 AM	Tube furnace set to 0
7/2/2012	11:36:50 AM	Run finished at 11:36 AM
7/2/2012	11:36:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/2/2012	11:41:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2012	11:41:57 AM	Recipe started at 11:41 AM
7/2/2012	11:41:57 AM	Helium valve closed
7/2/2012	11:41:57 AM	H2 valve closed
7/2/2012	11:41:57 AM	BCl3 valve closed
7/2/2012	11:41:57 AM	PH3 valve closed
7/2/2012	11:41:57 AM	SiCl4 pre valve closed
7/2/2012	11:41:57 AM	SiCl4 post valve closed
7/2/2012	11:41:57 AM	Main Vac valve closed
7/2/2012	11:41:57 AM	Bubbler valve closed
7/2/2012	11:41:57 AM	Bypass valve opened
7/2/2012	11:41:57 AM	Helium MFC set to  0.000000
7/2/2012	11:41:57 AM	H2 MFC set to  0.000000
7/2/2012	11:41:57 AM	BCl3 MFC set to  0.000000
7/2/2012	11:41:57 AM	PH3 MFC set to  0.000000
7/2/2012	11:41:57 AM	SiCl4 MFC set to  0.000000
7/2/2012	11:41:57 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	11:41:57 AM	Tube furnace set to 0
7/2/2012	11:43:08 AM	Helium valve closed
7/2/2012	11:43:08 AM	H2 valve closed
7/2/2012	11:43:08 AM	BCl3 valve closed
7/2/2012	11:43:08 AM	PH3 valve closed
7/2/2012	11:43:08 AM	SiCl4 pre valve closed
7/2/2012	11:43:08 AM	SiCl4 post valve closed
7/2/2012	11:43:08 AM	Main Vac valve closed
7/2/2012	11:43:08 AM	Bubbler valve closed
7/2/2012	11:43:08 AM	Bypass valve opened
7/2/2012	11:43:08 AM	Helium MFC set to  0.000000
7/2/2012	11:43:08 AM	H2 MFC set to  0.000000
7/2/2012	11:43:08 AM	BCl3 MFC set to  0.000000
7/2/2012	11:43:08 AM	PH3 MFC set to  0.000000
7/2/2012	11:43:08 AM	SiCl4 MFC set to  0.000000
7/2/2012	11:43:08 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	11:43:08 AM	Tube furnace set to 0
7/2/2012	11:44:08 AM	Helium valve closed
7/2/2012	11:44:08 AM	H2 valve closed
7/2/2012	11:44:08 AM	BCl3 valve closed
7/2/2012	11:44:08 AM	PH3 valve closed
7/2/2012	11:44:08 AM	SiCl4 pre valve closed
7/2/2012	11:44:08 AM	SiCl4 post valve closed
7/2/2012	11:44:08 AM	Bypass valve closed
7/2/2012	11:44:08 AM	Bubbler valve closed
7/2/2012	11:44:08 AM	Main Vac valve opened
7/2/2012	11:44:08 AM	Helium MFC set to  0.000000
7/2/2012	11:44:08 AM	H2 MFC set to  0.000000
7/2/2012	11:44:08 AM	BCl3 MFC set to  0.000000
7/2/2012	11:44:08 AM	PH3 MFC set to  0.000000
7/2/2012	11:44:08 AM	SiCl4 MFC set to  0.000000
7/2/2012	11:44:08 AM	Bypass solenoid MFC set to  0.000000
7/2/2012	11:44:08 AM	Tube furnace set to 0
7/2/2012	11:44:09 AM	Run finished at 11:44 AM
7/2/2012	11:44:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2012	12:15:34 PM	Main Vac valve closed
7/2/2012	12:15:45 PM	Main Vac valve opened
7/2/2012	12:16:41 PM	Recipe started at 12:16 PM
7/2/2012	12:16:41 PM	Helium valve closed
7/2/2012	12:16:41 PM	H2 valve closed
7/2/2012	12:16:41 PM	BCl3 valve closed
7/2/2012	12:16:41 PM	PH3 valve closed
7/2/2012	12:16:41 PM	SiCl4 pre valve closed
7/2/2012	12:16:41 PM	SiCl4 post valve closed
7/2/2012	12:16:41 PM	Bypass valve closed
7/2/2012	12:16:41 PM	Bubbler valve closed
7/2/2012	12:16:41 PM	Main Vac valve opened
7/2/2012	12:16:41 PM	Helium MFC set to  0.000000
7/2/2012	12:16:41 PM	H2 MFC set to  0.000000
7/2/2012	12:16:41 PM	BCl3 MFC set to  0.000000
7/2/2012	12:16:41 PM	PH3 MFC set to  0.000000
7/2/2012	12:16:41 PM	SiCl4 MFC set to  0.000000
7/2/2012	12:16:41 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	12:16:41 PM	Tube furnace set to 0
7/2/2012	1:16:41 PM	Helium valve closed
7/2/2012	1:16:41 PM	H2 valve closed
7/2/2012	1:16:41 PM	BCl3 valve closed
7/2/2012	1:16:41 PM	PH3 valve closed
7/2/2012	1:16:41 PM	SiCl4 pre valve closed
7/2/2012	1:16:41 PM	SiCl4 post valve closed
7/2/2012	1:16:41 PM	Main Vac valve closed
7/2/2012	1:16:41 PM	Bypass valve closed
7/2/2012	1:16:41 PM	Bubbler valve closed
7/2/2012	1:16:41 PM	Helium MFC set to  0.000000
7/2/2012	1:16:41 PM	H2 MFC set to  0.000000
7/2/2012	1:16:41 PM	BCl3 MFC set to  0.000000
7/2/2012	1:16:41 PM	PH3 MFC set to  0.000000
7/2/2012	1:16:41 PM	SiCl4 MFC set to  0.000000
7/2/2012	1:16:41 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	1:16:42 PM	Tube furnace set to 0
7/2/2012	1:16:45 PM	Helium valve closed
7/2/2012	1:16:45 PM	BCl3 valve closed
7/2/2012	1:16:45 PM	PH3 valve closed
7/2/2012	1:16:45 PM	SiCl4 pre valve closed
7/2/2012	1:16:45 PM	SiCl4 post valve closed
7/2/2012	1:16:45 PM	Main Vac valve closed
7/2/2012	1:16:45 PM	Bypass valve closed
7/2/2012	1:16:45 PM	Bubbler valve closed
7/2/2012	1:16:45 PM	H2 valve opened
7/2/2012	1:16:45 PM	Helium MFC set to  0.000000
7/2/2012	1:16:45 PM	H2 MFC set to  500.000000
7/2/2012	1:16:45 PM	BCl3 MFC set to  0.000000
7/2/2012	1:16:45 PM	PH3 MFC set to  0.000000
7/2/2012	1:16:45 PM	SiCl4 MFC set to  0.000000
7/2/2012	1:16:45 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	1:16:45 PM	Tube furnace set to 0
7/2/2012	1:17:58 PM	Helium valve closed
7/2/2012	1:17:58 PM	BCl3 valve closed
7/2/2012	1:17:58 PM	PH3 valve closed
7/2/2012	1:17:58 PM	SiCl4 pre valve closed
7/2/2012	1:17:58 PM	SiCl4 post valve closed
7/2/2012	1:17:58 PM	Main Vac valve closed
7/2/2012	1:17:58 PM	Bypass valve closed
7/2/2012	1:17:58 PM	H2 valve opened
7/2/2012	1:17:58 PM	Bubbler valve opened
7/2/2012	1:17:58 PM	Helium MFC set to  0.000000
7/2/2012	1:17:58 PM	H2 MFC set to  500.000000
7/2/2012	1:17:58 PM	BCl3 MFC set to  0.000000
7/2/2012	1:17:58 PM	PH3 MFC set to  0.000000
7/2/2012	1:17:58 PM	SiCl4 MFC set to  0.000000
7/2/2012	1:17:58 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	1:17:58 PM	Tube furnace set to 0
7/2/2012	1:17:59 PM	Helium valve closed
7/2/2012	1:17:59 PM	BCl3 valve closed
7/2/2012	1:17:59 PM	PH3 valve closed
7/2/2012	1:17:59 PM	SiCl4 pre valve closed
7/2/2012	1:17:59 PM	SiCl4 post valve closed
7/2/2012	1:17:59 PM	Main Vac valve closed
7/2/2012	1:17:59 PM	Bypass valve closed
7/2/2012	1:17:59 PM	H2 valve opened
7/2/2012	1:17:59 PM	Bubbler valve opened
7/2/2012	1:17:59 PM	Helium MFC set to  0.000000
7/2/2012	1:17:59 PM	H2 MFC set to  500.000000
7/2/2012	1:17:59 PM	BCl3 MFC set to  0.000000
7/2/2012	1:17:59 PM	PH3 MFC set to  0.000000
7/2/2012	1:17:59 PM	SiCl4 MFC set to  0.000000
7/2/2012	1:17:59 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	1:18:00 PM	Tube furnace set to 1000
7/2/2012	1:43:00 PM	Helium valve closed
7/2/2012	1:43:00 PM	PH3 valve closed
7/2/2012	1:43:00 PM	Main Vac valve closed
7/2/2012	1:43:00 PM	Bypass valve closed
7/2/2012	1:43:00 PM	H2 valve opened
7/2/2012	1:43:00 PM	BCl3 valve opened
7/2/2012	1:43:00 PM	SiCl4 pre valve opened
7/2/2012	1:43:00 PM	SiCl4 post valve opened
7/2/2012	1:43:00 PM	Bubbler valve opened
7/2/2012	1:43:00 PM	Helium MFC set to  0.000000
7/2/2012	1:43:00 PM	H2 MFC set to  450.000000
7/2/2012	1:43:00 PM	BCl3 MFC set to  1.000000
7/2/2012	1:43:00 PM	PH3 MFC set to  0.000000
7/2/2012	1:43:00 PM	SiCl4 MFC set to  50.000000
7/2/2012	1:43:00 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	1:43:00 PM	Tube furnace set to 1000
7/2/2012	2:12:00 PM	Helium valve closed
7/2/2012	2:12:00 PM	BCl3 valve closed
7/2/2012	2:12:00 PM	PH3 valve closed
7/2/2012	2:12:00 PM	SiCl4 pre valve closed
7/2/2012	2:12:00 PM	SiCl4 post valve closed
7/2/2012	2:12:00 PM	Main Vac valve closed
7/2/2012	2:12:00 PM	Bypass valve closed
7/2/2012	2:12:00 PM	H2 valve opened
7/2/2012	2:12:00 PM	Bubbler valve opened
7/2/2012	2:12:00 PM	Helium MFC set to  0.000000
7/2/2012	2:12:00 PM	H2 MFC set to  500.000000
7/2/2012	2:12:00 PM	BCl3 MFC set to  0.000000
7/2/2012	2:12:00 PM	PH3 MFC set to  0.000000
7/2/2012	2:12:00 PM	SiCl4 MFC set to  0.000000
7/2/2012	2:12:00 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	2:12:00 PM	Tube furnace set to 750
7/2/2012	2:27:00 PM	H2 valve closed
7/2/2012	2:27:00 PM	BCl3 valve closed
7/2/2012	2:27:00 PM	PH3 valve closed
7/2/2012	2:27:00 PM	SiCl4 pre valve closed
7/2/2012	2:27:00 PM	SiCl4 post valve closed
7/2/2012	2:27:00 PM	Main Vac valve closed
7/2/2012	2:27:00 PM	Bypass valve closed
7/2/2012	2:27:00 PM	Helium valve opened
7/2/2012	2:27:00 PM	Bubbler valve opened
7/2/2012	2:27:00 PM	Helium MFC set to  500.000000
7/2/2012	2:27:00 PM	H2 MFC set to  0.000000
7/2/2012	2:27:00 PM	BCl3 MFC set to  0.000000
7/2/2012	2:27:00 PM	PH3 MFC set to  0.000000
7/2/2012	2:27:00 PM	SiCl4 MFC set to  0.000000
7/2/2012	2:27:00 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	2:27:00 PM	Tube furnace set to 0
7/2/2012	2:47:00 PM	Helium valve closed
7/2/2012	2:47:00 PM	H2 valve closed
7/2/2012	2:47:00 PM	BCl3 valve closed
7/2/2012	2:47:00 PM	PH3 valve closed
7/2/2012	2:47:00 PM	SiCl4 pre valve closed
7/2/2012	2:47:00 PM	SiCl4 post valve closed
7/2/2012	2:47:00 PM	Main Vac valve closed
7/2/2012	2:47:00 PM	Bypass valve closed
7/2/2012	2:47:00 PM	Bubbler valve closed
7/2/2012	2:47:00 PM	Helium MFC set to  0.000000
7/2/2012	2:47:00 PM	H2 MFC set to  0.000000
7/2/2012	2:47:00 PM	BCl3 MFC set to  0.000000
7/2/2012	2:47:00 PM	PH3 MFC set to  0.000000
7/2/2012	2:47:00 PM	SiCl4 MFC set to  0.000000
7/2/2012	2:47:00 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	2:47:00 PM	Tube furnace set to 0
7/2/2012	2:49:21 PM	Helium valve closed
7/2/2012	2:49:21 PM	H2 valve closed
7/2/2012	2:49:21 PM	BCl3 valve closed
7/2/2012	2:49:21 PM	PH3 valve closed
7/2/2012	2:49:21 PM	SiCl4 pre valve closed
7/2/2012	2:49:21 PM	SiCl4 post valve closed
7/2/2012	2:49:21 PM	Main Vac valve closed
7/2/2012	2:49:21 PM	Bubbler valve closed
7/2/2012	2:49:21 PM	Bypass valve opened
7/2/2012	2:49:21 PM	Helium MFC set to  0.000000
7/2/2012	2:49:21 PM	H2 MFC set to  0.000000
7/2/2012	2:49:21 PM	BCl3 MFC set to  0.000000
7/2/2012	2:49:21 PM	PH3 MFC set to  0.000000
7/2/2012	2:49:21 PM	SiCl4 MFC set to  0.000000
7/2/2012	2:49:21 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	2:49:22 PM	Tube furnace set to 0
7/2/2012	2:50:17 PM	Helium valve closed
7/2/2012	2:50:17 PM	H2 valve closed
7/2/2012	2:50:17 PM	BCl3 valve closed
7/2/2012	2:50:17 PM	PH3 valve closed
7/2/2012	2:50:17 PM	SiCl4 pre valve closed
7/2/2012	2:50:17 PM	SiCl4 post valve closed
7/2/2012	2:50:17 PM	Main Vac valve closed
7/2/2012	2:50:17 PM	Bubbler valve closed
7/2/2012	2:50:17 PM	Bypass valve opened
7/2/2012	2:50:17 PM	Helium MFC set to  0.000000
7/2/2012	2:50:17 PM	H2 MFC set to  0.000000
7/2/2012	2:50:17 PM	BCl3 MFC set to  0.000000
7/2/2012	2:50:17 PM	PH3 MFC set to  0.000000
7/2/2012	2:50:17 PM	SiCl4 MFC set to  0.000000
7/2/2012	2:50:17 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	2:50:17 PM	Tube furnace set to 0
7/2/2012	2:51:17 PM	Helium valve closed
7/2/2012	2:51:17 PM	H2 valve closed
7/2/2012	2:51:17 PM	BCl3 valve closed
7/2/2012	2:51:17 PM	PH3 valve closed
7/2/2012	2:51:17 PM	SiCl4 pre valve closed
7/2/2012	2:51:17 PM	SiCl4 post valve closed
7/2/2012	2:51:17 PM	Bypass valve closed
7/2/2012	2:51:17 PM	Bubbler valve closed
7/2/2012	2:51:17 PM	Main Vac valve opened
7/2/2012	2:51:17 PM	Helium MFC set to  0.000000
7/2/2012	2:51:17 PM	H2 MFC set to  0.000000
7/2/2012	2:51:17 PM	BCl3 MFC set to  0.000000
7/2/2012	2:51:17 PM	PH3 MFC set to  0.000000
7/2/2012	2:51:17 PM	SiCl4 MFC set to  0.000000
7/2/2012	2:51:17 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	2:51:17 PM	Tube furnace set to 0
7/2/2012	2:52:17 PM	Run finished at 2:52 PM
7/2/2012	2:52:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/2/2012	2:52:24 PM	Recipe started at 2:52 PM
7/2/2012	2:52:24 PM	Helium valve closed
7/2/2012	2:52:24 PM	H2 valve closed
7/2/2012	2:52:24 PM	BCl3 valve closed
7/2/2012	2:52:24 PM	PH3 valve closed
7/2/2012	2:52:24 PM	SiCl4 pre valve closed
7/2/2012	2:52:24 PM	SiCl4 post valve closed
7/2/2012	2:52:24 PM	Main Vac valve closed
7/2/2012	2:52:24 PM	Bypass valve closed
7/2/2012	2:52:24 PM	Bubbler valve closed
7/2/2012	2:52:24 PM	Helium MFC set to  0.000000
7/2/2012	2:52:24 PM	H2 MFC set to  0.000000
7/2/2012	2:52:24 PM	BCl3 MFC set to  0.000000
7/2/2012	2:52:24 PM	PH3 MFC set to  0.000000
7/2/2012	2:52:24 PM	SiCl4 MFC set to  0.000000
7/2/2012	2:52:24 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	2:52:24 PM	Tube furnace set to 0
7/2/2012	2:52:27 PM	H2 valve closed
7/2/2012	2:52:27 PM	BCl3 valve closed
7/2/2012	2:52:28 PM	PH3 valve closed
7/2/2012	2:52:28 PM	SiCl4 pre valve closed
7/2/2012	2:52:28 PM	SiCl4 post valve closed
7/2/2012	2:52:28 PM	Main Vac valve closed
7/2/2012	2:52:28 PM	Bypass valve closed
7/2/2012	2:52:28 PM	Bubbler valve closed
7/2/2012	2:52:28 PM	Helium valve opened
7/2/2012	2:52:28 PM	Helium MFC set to  500.000000
7/2/2012	2:52:28 PM	H2 MFC set to  0.000000
7/2/2012	2:52:28 PM	BCl3 MFC set to  0.000000
7/2/2012	2:52:28 PM	PH3 MFC set to  0.000000
7/2/2012	2:52:28 PM	SiCl4 MFC set to  0.000000
7/2/2012	2:52:28 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	2:52:28 PM	Tube furnace set to 0
7/2/2012	2:53:37 PM	Helium valve closed
7/2/2012	2:53:37 PM	H2 valve closed
7/2/2012	2:53:37 PM	BCl3 valve closed
7/2/2012	2:53:37 PM	PH3 valve closed
7/2/2012	2:53:37 PM	SiCl4 pre valve closed
7/2/2012	2:53:38 PM	SiCl4 post valve closed
7/2/2012	2:53:38 PM	Main Vac valve closed
7/2/2012	2:53:38 PM	Bypass valve closed
7/2/2012	2:53:38 PM	Bubbler valve closed
7/2/2012	2:53:38 PM	Helium MFC set to  0.000000
7/2/2012	2:53:38 PM	H2 MFC set to  0.000000
7/2/2012	2:53:38 PM	BCl3 MFC set to  0.000000
7/2/2012	2:53:38 PM	PH3 MFC set to  0.000000
7/2/2012	2:53:38 PM	SiCl4 MFC set to  0.000000
7/2/2012	2:53:38 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	2:53:38 PM	Tube furnace set to 0
7/2/2012	2:53:39 PM	Run finished at 2:53 PM
7/2/2012	2:53:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/2/2012	2:58:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2012	2:58:56 PM	Recipe started at 2:58 PM
7/2/2012	2:58:56 PM	Helium valve closed
7/2/2012	2:58:56 PM	H2 valve closed
7/2/2012	2:58:56 PM	BCl3 valve closed
7/2/2012	2:58:56 PM	PH3 valve closed
7/2/2012	2:58:56 PM	SiCl4 pre valve closed
7/2/2012	2:58:56 PM	SiCl4 post valve closed
7/2/2012	2:58:56 PM	Main Vac valve closed
7/2/2012	2:58:56 PM	Bubbler valve closed
7/2/2012	2:58:56 PM	Bypass valve opened
7/2/2012	2:58:56 PM	Helium MFC set to  0.000000
7/2/2012	2:58:56 PM	H2 MFC set to  0.000000
7/2/2012	2:58:56 PM	BCl3 MFC set to  0.000000
7/2/2012	2:58:56 PM	PH3 MFC set to  0.000000
7/2/2012	2:58:56 PM	SiCl4 MFC set to  0.000000
7/2/2012	2:58:56 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	2:58:56 PM	Tube furnace set to 0
7/2/2012	3:00:06 PM	Helium valve closed
7/2/2012	3:00:06 PM	H2 valve closed
7/2/2012	3:00:06 PM	BCl3 valve closed
7/2/2012	3:00:06 PM	PH3 valve closed
7/2/2012	3:00:06 PM	SiCl4 pre valve closed
7/2/2012	3:00:06 PM	SiCl4 post valve closed
7/2/2012	3:00:06 PM	Main Vac valve closed
7/2/2012	3:00:06 PM	Bubbler valve closed
7/2/2012	3:00:06 PM	Bypass valve opened
7/2/2012	3:00:06 PM	Helium MFC set to  0.000000
7/2/2012	3:00:06 PM	H2 MFC set to  0.000000
7/2/2012	3:00:06 PM	BCl3 MFC set to  0.000000
7/2/2012	3:00:06 PM	PH3 MFC set to  0.000000
7/2/2012	3:00:06 PM	SiCl4 MFC set to  0.000000
7/2/2012	3:00:06 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	3:00:06 PM	Tube furnace set to 0
7/2/2012	3:01:06 PM	Helium valve closed
7/2/2012	3:01:06 PM	H2 valve closed
7/2/2012	3:01:06 PM	BCl3 valve closed
7/2/2012	3:01:06 PM	PH3 valve closed
7/2/2012	3:01:06 PM	SiCl4 pre valve closed
7/2/2012	3:01:06 PM	SiCl4 post valve closed
7/2/2012	3:01:06 PM	Bypass valve closed
7/2/2012	3:01:06 PM	Bubbler valve closed
7/2/2012	3:01:06 PM	Main Vac valve opened
7/2/2012	3:01:06 PM	Helium MFC set to  0.000000
7/2/2012	3:01:06 PM	H2 MFC set to  0.000000
7/2/2012	3:01:06 PM	BCl3 MFC set to  0.000000
7/2/2012	3:01:06 PM	PH3 MFC set to  0.000000
7/2/2012	3:01:06 PM	SiCl4 MFC set to  0.000000
7/2/2012	3:01:06 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	3:01:06 PM	Tube furnace set to 0
7/2/2012	3:01:07 PM	Run finished at 3:01 PM
7/2/2012	3:01:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2012	4:29:16 PM	Main Vac valve closed
7/2/2012	4:29:29 PM	Main Vac valve opened
7/2/2012	4:30:57 PM	Recipe started at 4:30 PM
7/2/2012	4:30:57 PM	Helium valve closed
7/2/2012	4:30:57 PM	H2 valve closed
7/2/2012	4:30:57 PM	BCl3 valve closed
7/2/2012	4:30:57 PM	PH3 valve closed
7/2/2012	4:30:57 PM	SiCl4 pre valve closed
7/2/2012	4:30:57 PM	SiCl4 post valve closed
7/2/2012	4:30:57 PM	Bypass valve closed
7/2/2012	4:30:57 PM	Bubbler valve closed
7/2/2012	4:30:57 PM	Main Vac valve opened
7/2/2012	4:30:57 PM	Helium MFC set to  0.000000
7/2/2012	4:30:57 PM	H2 MFC set to  0.000000
7/2/2012	4:30:57 PM	BCl3 MFC set to  0.000000
7/2/2012	4:30:57 PM	PH3 MFC set to  0.000000
7/2/2012	4:30:57 PM	SiCl4 MFC set to  0.000000
7/2/2012	4:30:57 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	4:30:57 PM	Tube furnace set to 0
7/2/2012	4:30:58 PM	Helium valve closed
7/2/2012	4:30:58 PM	H2 valve closed
7/2/2012	4:30:58 PM	BCl3 valve closed
7/2/2012	4:30:58 PM	PH3 valve closed
7/2/2012	4:30:58 PM	SiCl4 pre valve closed
7/2/2012	4:30:58 PM	SiCl4 post valve closed
7/2/2012	4:30:58 PM	Main Vac valve closed
7/2/2012	4:30:58 PM	Bypass valve closed
7/2/2012	4:30:58 PM	Bubbler valve closed
7/2/2012	4:30:58 PM	Helium MFC set to  0.000000
7/2/2012	4:30:58 PM	H2 MFC set to  0.000000
7/2/2012	4:30:58 PM	BCl3 MFC set to  0.000000
7/2/2012	4:30:58 PM	PH3 MFC set to  0.000000
7/2/2012	4:30:58 PM	SiCl4 MFC set to  0.000000
7/2/2012	4:30:58 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	4:30:58 PM	Tube furnace set to 0
7/2/2012	4:31:01 PM	Helium valve closed
7/2/2012	4:31:01 PM	BCl3 valve closed
7/2/2012	4:31:01 PM	PH3 valve closed
7/2/2012	4:31:01 PM	SiCl4 pre valve closed
7/2/2012	4:31:01 PM	SiCl4 post valve closed
7/2/2012	4:31:01 PM	Main Vac valve closed
7/2/2012	4:31:01 PM	Bypass valve closed
7/2/2012	4:31:01 PM	Bubbler valve closed
7/2/2012	4:31:01 PM	H2 valve opened
7/2/2012	4:31:01 PM	Helium MFC set to  0.000000
7/2/2012	4:31:01 PM	H2 MFC set to  500.000000
7/2/2012	4:31:01 PM	BCl3 MFC set to  0.000000
7/2/2012	4:31:01 PM	PH3 MFC set to  0.000000
7/2/2012	4:31:01 PM	SiCl4 MFC set to  0.000000
7/2/2012	4:31:01 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	4:31:01 PM	Tube furnace set to 0
7/2/2012	4:32:15 PM	Helium valve closed
7/2/2012	4:32:15 PM	BCl3 valve closed
7/2/2012	4:32:15 PM	PH3 valve closed
7/2/2012	4:32:15 PM	SiCl4 pre valve closed
7/2/2012	4:32:15 PM	SiCl4 post valve closed
7/2/2012	4:32:15 PM	Main Vac valve closed
7/2/2012	4:32:15 PM	Bypass valve closed
7/2/2012	4:32:15 PM	H2 valve opened
7/2/2012	4:32:15 PM	Bubbler valve opened
7/2/2012	4:32:15 PM	Helium MFC set to  0.000000
7/2/2012	4:32:15 PM	H2 MFC set to  500.000000
7/2/2012	4:32:15 PM	BCl3 MFC set to  0.000000
7/2/2012	4:32:15 PM	PH3 MFC set to  0.000000
7/2/2012	4:32:15 PM	SiCl4 MFC set to  0.000000
7/2/2012	4:32:15 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	4:32:15 PM	Tube furnace set to 0
7/2/2012	4:32:16 PM	Helium valve closed
7/2/2012	4:32:16 PM	BCl3 valve closed
7/2/2012	4:32:16 PM	PH3 valve closed
7/2/2012	4:32:16 PM	SiCl4 pre valve closed
7/2/2012	4:32:16 PM	SiCl4 post valve closed
7/2/2012	4:32:16 PM	Main Vac valve closed
7/2/2012	4:32:16 PM	Bypass valve closed
7/2/2012	4:32:16 PM	H2 valve opened
7/2/2012	4:32:16 PM	Bubbler valve opened
7/2/2012	4:32:16 PM	Helium MFC set to  0.000000
7/2/2012	4:32:16 PM	H2 MFC set to  500.000000
7/2/2012	4:32:16 PM	BCl3 MFC set to  0.000000
7/2/2012	4:32:16 PM	PH3 MFC set to  0.000000
7/2/2012	4:32:16 PM	SiCl4 MFC set to  0.000000
7/2/2012	4:32:16 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	4:32:16 PM	Tube furnace set to 1000
7/2/2012	4:57:16 PM	Helium valve closed
7/2/2012	4:57:16 PM	PH3 valve closed
7/2/2012	4:57:16 PM	Main Vac valve closed
7/2/2012	4:57:16 PM	Bypass valve closed
7/2/2012	4:57:16 PM	H2 valve opened
7/2/2012	4:57:16 PM	BCl3 valve opened
7/2/2012	4:57:16 PM	SiCl4 pre valve opened
7/2/2012	4:57:16 PM	SiCl4 post valve opened
7/2/2012	4:57:16 PM	Bubbler valve opened
7/2/2012	4:57:16 PM	Helium MFC set to  0.000000
7/2/2012	4:57:16 PM	H2 MFC set to  450.000000
7/2/2012	4:57:16 PM	BCl3 MFC set to  1.000000
7/2/2012	4:57:16 PM	PH3 MFC set to  0.000000
7/2/2012	4:57:16 PM	SiCl4 MFC set to  50.000000
7/2/2012	4:57:16 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	4:57:16 PM	Tube furnace set to 1000
7/2/2012	5:25:16 PM	Helium valve closed
7/2/2012	5:25:16 PM	BCl3 valve closed
7/2/2012	5:25:16 PM	PH3 valve closed
7/2/2012	5:25:16 PM	SiCl4 pre valve closed
7/2/2012	5:25:16 PM	SiCl4 post valve closed
7/2/2012	5:25:16 PM	Main Vac valve closed
7/2/2012	5:25:16 PM	Bypass valve closed
7/2/2012	5:25:16 PM	H2 valve opened
7/2/2012	5:25:16 PM	Bubbler valve opened
7/2/2012	5:25:16 PM	Helium MFC set to  0.000000
7/2/2012	5:25:16 PM	H2 MFC set to  500.000000
7/2/2012	5:25:16 PM	BCl3 MFC set to  0.000000
7/2/2012	5:25:16 PM	PH3 MFC set to  0.000000
7/2/2012	5:25:16 PM	SiCl4 MFC set to  0.000000
7/2/2012	5:25:16 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	5:25:16 PM	Tube furnace set to 750
7/2/2012	5:40:16 PM	H2 valve closed
7/2/2012	5:40:16 PM	BCl3 valve closed
7/2/2012	5:40:16 PM	PH3 valve closed
7/2/2012	5:40:16 PM	SiCl4 pre valve closed
7/2/2012	5:40:16 PM	SiCl4 post valve closed
7/2/2012	5:40:16 PM	Main Vac valve closed
7/2/2012	5:40:16 PM	Bypass valve closed
7/2/2012	5:40:16 PM	Helium valve opened
7/2/2012	5:40:16 PM	Bubbler valve opened
7/2/2012	5:40:16 PM	Helium MFC set to  500.000000
7/2/2012	5:40:16 PM	H2 MFC set to  0.000000
7/2/2012	5:40:16 PM	BCl3 MFC set to  0.000000
7/2/2012	5:40:16 PM	PH3 MFC set to  0.000000
7/2/2012	5:40:16 PM	SiCl4 MFC set to  0.000000
7/2/2012	5:40:16 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	5:40:16 PM	Tube furnace set to 0
7/2/2012	6:00:16 PM	Helium valve closed
7/2/2012	6:00:16 PM	H2 valve closed
7/2/2012	6:00:16 PM	BCl3 valve closed
7/2/2012	6:00:16 PM	PH3 valve closed
7/2/2012	6:00:16 PM	SiCl4 pre valve closed
7/2/2012	6:00:16 PM	SiCl4 post valve closed
7/2/2012	6:00:16 PM	Main Vac valve closed
7/2/2012	6:00:16 PM	Bypass valve closed
7/2/2012	6:00:16 PM	Bubbler valve closed
7/2/2012	6:00:16 PM	Helium MFC set to  0.000000
7/2/2012	6:00:16 PM	H2 MFC set to  0.000000
7/2/2012	6:00:16 PM	BCl3 MFC set to  0.000000
7/2/2012	6:00:16 PM	PH3 MFC set to  0.000000
7/2/2012	6:00:16 PM	SiCl4 MFC set to  0.000000
7/2/2012	6:00:16 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	6:00:17 PM	Tube furnace set to 0
7/2/2012	6:01:17 PM	Helium valve closed
7/2/2012	6:01:17 PM	H2 valve closed
7/2/2012	6:01:17 PM	BCl3 valve closed
7/2/2012	6:01:17 PM	PH3 valve closed
7/2/2012	6:01:17 PM	SiCl4 pre valve closed
7/2/2012	6:01:17 PM	SiCl4 post valve closed
7/2/2012	6:01:17 PM	Main Vac valve closed
7/2/2012	6:01:17 PM	Bubbler valve closed
7/2/2012	6:01:17 PM	Bypass valve opened
7/2/2012	6:01:17 PM	Helium MFC set to  0.000000
7/2/2012	6:01:17 PM	H2 MFC set to  0.000000
7/2/2012	6:01:17 PM	BCl3 MFC set to  0.000000
7/2/2012	6:01:17 PM	PH3 MFC set to  0.000000
7/2/2012	6:01:17 PM	SiCl4 MFC set to  0.000000
7/2/2012	6:01:17 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	6:01:17 PM	Tube furnace set to 0
7/2/2012	6:02:08 PM	Helium valve closed
7/2/2012	6:02:08 PM	H2 valve closed
7/2/2012	6:02:08 PM	BCl3 valve closed
7/2/2012	6:02:08 PM	PH3 valve closed
7/2/2012	6:02:08 PM	SiCl4 pre valve closed
7/2/2012	6:02:08 PM	SiCl4 post valve closed
7/2/2012	6:02:08 PM	Main Vac valve closed
7/2/2012	6:02:08 PM	Bubbler valve closed
7/2/2012	6:02:08 PM	Bypass valve opened
7/2/2012	6:02:08 PM	Helium MFC set to  0.000000
7/2/2012	6:02:08 PM	H2 MFC set to  0.000000
7/2/2012	6:02:08 PM	BCl3 MFC set to  0.000000
7/2/2012	6:02:08 PM	PH3 MFC set to  0.000000
7/2/2012	6:02:08 PM	SiCl4 MFC set to  0.000000
7/2/2012	6:02:08 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	6:02:08 PM	Tube furnace set to 0
7/2/2012	6:03:08 PM	Helium valve closed
7/2/2012	6:03:08 PM	H2 valve closed
7/2/2012	6:03:08 PM	BCl3 valve closed
7/2/2012	6:03:08 PM	PH3 valve closed
7/2/2012	6:03:08 PM	SiCl4 pre valve closed
7/2/2012	6:03:08 PM	SiCl4 post valve closed
7/2/2012	6:03:08 PM	Bypass valve closed
7/2/2012	6:03:08 PM	Bubbler valve closed
7/2/2012	6:03:08 PM	Main Vac valve opened
7/2/2012	6:03:08 PM	Helium MFC set to  0.000000
7/2/2012	6:03:08 PM	H2 MFC set to  0.000000
7/2/2012	6:03:08 PM	BCl3 MFC set to  0.000000
7/2/2012	6:03:08 PM	PH3 MFC set to  0.000000
7/2/2012	6:03:08 PM	SiCl4 MFC set to  0.000000
7/2/2012	6:03:08 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	6:03:09 PM	Tube furnace set to 0
7/2/2012	7:02:54 PM	Run finished at 7:02 PM
7/2/2012	7:04:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/2/2012	7:04:25 PM	Recipe started at 7:04 PM
7/2/2012	7:04:25 PM	Helium valve closed
7/2/2012	7:04:25 PM	H2 valve closed
7/2/2012	7:04:25 PM	BCl3 valve closed
7/2/2012	7:04:25 PM	PH3 valve closed
7/2/2012	7:04:25 PM	SiCl4 pre valve closed
7/2/2012	7:04:25 PM	SiCl4 post valve closed
7/2/2012	7:04:25 PM	Main Vac valve closed
7/2/2012	7:04:25 PM	Bypass valve closed
7/2/2012	7:04:25 PM	Bubbler valve closed
7/2/2012	7:04:25 PM	Helium MFC set to  0.000000
7/2/2012	7:04:25 PM	H2 MFC set to  0.000000
7/2/2012	7:04:25 PM	BCl3 MFC set to  0.000000
7/2/2012	7:04:25 PM	PH3 MFC set to  0.000000
7/2/2012	7:04:25 PM	SiCl4 MFC set to  0.000000
7/2/2012	7:04:25 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	7:04:25 PM	Tube furnace set to 0
7/2/2012	7:04:28 PM	H2 valve closed
7/2/2012	7:04:28 PM	BCl3 valve closed
7/2/2012	7:04:28 PM	PH3 valve closed
7/2/2012	7:04:28 PM	SiCl4 pre valve closed
7/2/2012	7:04:28 PM	SiCl4 post valve closed
7/2/2012	7:04:28 PM	Main Vac valve closed
7/2/2012	7:04:28 PM	Bypass valve closed
7/2/2012	7:04:28 PM	Bubbler valve closed
7/2/2012	7:04:28 PM	Helium valve opened
7/2/2012	7:04:28 PM	Helium MFC set to  500.000000
7/2/2012	7:04:28 PM	H2 MFC set to  0.000000
7/2/2012	7:04:28 PM	BCl3 MFC set to  0.000000
7/2/2012	7:04:28 PM	PH3 MFC set to  0.000000
7/2/2012	7:04:28 PM	SiCl4 MFC set to  0.000000
7/2/2012	7:04:28 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	7:04:29 PM	Tube furnace set to 0
7/2/2012	7:05:37 PM	Helium valve closed
7/2/2012	7:05:37 PM	H2 valve closed
7/2/2012	7:05:37 PM	BCl3 valve closed
7/2/2012	7:05:37 PM	PH3 valve closed
7/2/2012	7:05:37 PM	SiCl4 pre valve closed
7/2/2012	7:05:37 PM	SiCl4 post valve closed
7/2/2012	7:05:37 PM	Main Vac valve closed
7/2/2012	7:05:37 PM	Bypass valve closed
7/2/2012	7:05:37 PM	Bubbler valve closed
7/2/2012	7:05:37 PM	Helium MFC set to  0.000000
7/2/2012	7:05:37 PM	H2 MFC set to  0.000000
7/2/2012	7:05:37 PM	BCl3 MFC set to  0.000000
7/2/2012	7:05:37 PM	PH3 MFC set to  0.000000
7/2/2012	7:05:37 PM	SiCl4 MFC set to  0.000000
7/2/2012	7:05:37 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	7:05:37 PM	Tube furnace set to 0
7/2/2012	7:05:38 PM	Run finished at 7:05 PM
7/2/2012	7:05:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/2/2012	7:10:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2012	7:10:01 PM	Recipe started at 7:10 PM
7/2/2012	7:10:01 PM	Helium valve closed
7/2/2012	7:10:01 PM	H2 valve closed
7/2/2012	7:10:01 PM	BCl3 valve closed
7/2/2012	7:10:01 PM	PH3 valve closed
7/2/2012	7:10:01 PM	SiCl4 pre valve closed
7/2/2012	7:10:01 PM	SiCl4 post valve closed
7/2/2012	7:10:01 PM	Main Vac valve closed
7/2/2012	7:10:01 PM	Bubbler valve closed
7/2/2012	7:10:01 PM	Bypass valve opened
7/2/2012	7:10:01 PM	Helium MFC set to  0.000000
7/2/2012	7:10:01 PM	H2 MFC set to  0.000000
7/2/2012	7:10:01 PM	BCl3 MFC set to  0.000000
7/2/2012	7:10:01 PM	PH3 MFC set to  0.000000
7/2/2012	7:10:01 PM	SiCl4 MFC set to  0.000000
7/2/2012	7:10:01 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	7:10:01 PM	Tube furnace set to 0
7/2/2012	7:11:09 PM	Helium valve closed
7/2/2012	7:11:09 PM	H2 valve closed
7/2/2012	7:11:09 PM	BCl3 valve closed
7/2/2012	7:11:09 PM	PH3 valve closed
7/2/2012	7:11:09 PM	SiCl4 pre valve closed
7/2/2012	7:11:09 PM	SiCl4 post valve closed
7/2/2012	7:11:09 PM	Main Vac valve closed
7/2/2012	7:11:09 PM	Bubbler valve closed
7/2/2012	7:11:09 PM	Bypass valve opened
7/2/2012	7:11:09 PM	Helium MFC set to  0.000000
7/2/2012	7:11:09 PM	H2 MFC set to  0.000000
7/2/2012	7:11:09 PM	BCl3 MFC set to  0.000000
7/2/2012	7:11:09 PM	PH3 MFC set to  0.000000
7/2/2012	7:11:09 PM	SiCl4 MFC set to  0.000000
7/2/2012	7:11:09 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	7:11:09 PM	Tube furnace set to 0
7/2/2012	7:12:10 PM	Helium valve closed
7/2/2012	7:12:10 PM	H2 valve closed
7/2/2012	7:12:10 PM	BCl3 valve closed
7/2/2012	7:12:10 PM	PH3 valve closed
7/2/2012	7:12:10 PM	SiCl4 pre valve closed
7/2/2012	7:12:10 PM	SiCl4 post valve closed
7/2/2012	7:12:10 PM	Bypass valve closed
7/2/2012	7:12:10 PM	Bubbler valve closed
7/2/2012	7:12:10 PM	Main Vac valve opened
7/2/2012	7:12:10 PM	Helium MFC set to  0.000000
7/2/2012	7:12:10 PM	H2 MFC set to  0.000000
7/2/2012	7:12:10 PM	BCl3 MFC set to  0.000000
7/2/2012	7:12:10 PM	PH3 MFC set to  0.000000
7/2/2012	7:12:10 PM	SiCl4 MFC set to  0.000000
7/2/2012	7:12:10 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	7:12:10 PM	Tube furnace set to 0
7/2/2012	7:12:11 PM	Run finished at 7:12 PM
7/2/2012	7:12:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/2/2012	7:13:09 PM	Recipe started at 7:13 PM
7/2/2012	7:13:09 PM	Helium valve closed
7/2/2012	7:13:09 PM	H2 valve closed
7/2/2012	7:13:09 PM	BCl3 valve closed
7/2/2012	7:13:09 PM	PH3 valve closed
7/2/2012	7:13:09 PM	SiCl4 pre valve closed
7/2/2012	7:13:09 PM	SiCl4 post valve closed
7/2/2012	7:13:09 PM	Bypass valve closed
7/2/2012	7:13:09 PM	Bubbler valve closed
7/2/2012	7:13:09 PM	Main Vac valve opened
7/2/2012	7:13:09 PM	Helium MFC set to  0.000000
7/2/2012	7:13:09 PM	H2 MFC set to  0.000000
7/2/2012	7:13:09 PM	BCl3 MFC set to  0.000000
7/2/2012	7:13:09 PM	PH3 MFC set to  0.000000
7/2/2012	7:13:09 PM	SiCl4 MFC set to  0.000000
7/2/2012	7:13:09 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	7:13:09 PM	Tube furnace set to 0
7/2/2012	8:43:09 PM	Helium valve closed
7/2/2012	8:43:09 PM	H2 valve closed
7/2/2012	8:43:09 PM	BCl3 valve closed
7/2/2012	8:43:09 PM	PH3 valve closed
7/2/2012	8:43:09 PM	SiCl4 pre valve closed
7/2/2012	8:43:09 PM	SiCl4 post valve closed
7/2/2012	8:43:09 PM	Main Vac valve closed
7/2/2012	8:43:09 PM	Bypass valve closed
7/2/2012	8:43:09 PM	Bubbler valve closed
7/2/2012	8:43:09 PM	Helium MFC set to  0.000000
7/2/2012	8:43:09 PM	H2 MFC set to  0.000000
7/2/2012	8:43:09 PM	BCl3 MFC set to  0.000000
7/2/2012	8:43:09 PM	PH3 MFC set to  0.000000
7/2/2012	8:43:09 PM	SiCl4 MFC set to  0.000000
7/2/2012	8:43:09 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	8:43:09 PM	Tube furnace set to 0
7/2/2012	8:43:12 PM	Helium valve closed
7/2/2012	8:43:12 PM	BCl3 valve closed
7/2/2012	8:43:12 PM	PH3 valve closed
7/2/2012	8:43:12 PM	SiCl4 pre valve closed
7/2/2012	8:43:12 PM	SiCl4 post valve closed
7/2/2012	8:43:12 PM	Main Vac valve closed
7/2/2012	8:43:12 PM	Bypass valve closed
7/2/2012	8:43:12 PM	Bubbler valve closed
7/2/2012	8:43:12 PM	H2 valve opened
7/2/2012	8:43:12 PM	Helium MFC set to  0.000000
7/2/2012	8:43:12 PM	H2 MFC set to  500.000000
7/2/2012	8:43:12 PM	BCl3 MFC set to  0.000000
7/2/2012	8:43:12 PM	PH3 MFC set to  0.000000
7/2/2012	8:43:12 PM	SiCl4 MFC set to  0.000000
7/2/2012	8:43:12 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	8:43:12 PM	Tube furnace set to 0
7/2/2012	8:44:26 PM	Helium valve closed
7/2/2012	8:44:26 PM	BCl3 valve closed
7/2/2012	8:44:26 PM	PH3 valve closed
7/2/2012	8:44:26 PM	SiCl4 pre valve closed
7/2/2012	8:44:26 PM	SiCl4 post valve closed
7/2/2012	8:44:26 PM	Main Vac valve closed
7/2/2012	8:44:26 PM	Bypass valve closed
7/2/2012	8:44:26 PM	H2 valve opened
7/2/2012	8:44:26 PM	Bubbler valve opened
7/2/2012	8:44:26 PM	Helium MFC set to  0.000000
7/2/2012	8:44:26 PM	H2 MFC set to  500.000000
7/2/2012	8:44:26 PM	BCl3 MFC set to  0.000000
7/2/2012	8:44:26 PM	PH3 MFC set to  0.000000
7/2/2012	8:44:26 PM	SiCl4 MFC set to  0.000000
7/2/2012	8:44:26 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	8:44:27 PM	Tube furnace set to 0
7/2/2012	8:44:28 PM	Helium valve closed
7/2/2012	8:44:28 PM	BCl3 valve closed
7/2/2012	8:44:28 PM	PH3 valve closed
7/2/2012	8:44:28 PM	SiCl4 pre valve closed
7/2/2012	8:44:28 PM	SiCl4 post valve closed
7/2/2012	8:44:28 PM	Main Vac valve closed
7/2/2012	8:44:28 PM	Bypass valve closed
7/2/2012	8:44:28 PM	H2 valve opened
7/2/2012	8:44:28 PM	Bubbler valve opened
7/2/2012	8:44:28 PM	Helium MFC set to  0.000000
7/2/2012	8:44:28 PM	H2 MFC set to  500.000000
7/2/2012	8:44:28 PM	BCl3 MFC set to  0.000000
7/2/2012	8:44:28 PM	PH3 MFC set to  0.000000
7/2/2012	8:44:28 PM	SiCl4 MFC set to  0.000000
7/2/2012	8:44:28 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	8:44:28 PM	Tube furnace set to 1000
7/2/2012	9:09:28 PM	Helium valve closed
7/2/2012	9:09:28 PM	PH3 valve closed
7/2/2012	9:09:28 PM	Main Vac valve closed
7/2/2012	9:09:28 PM	Bypass valve closed
7/2/2012	9:09:28 PM	H2 valve opened
7/2/2012	9:09:28 PM	BCl3 valve opened
7/2/2012	9:09:28 PM	SiCl4 pre valve opened
7/2/2012	9:09:28 PM	SiCl4 post valve opened
7/2/2012	9:09:28 PM	Bubbler valve opened
7/2/2012	9:09:28 PM	Helium MFC set to  0.000000
7/2/2012	9:09:28 PM	H2 MFC set to  450.000000
7/2/2012	9:09:28 PM	BCl3 MFC set to  0.750000
7/2/2012	9:09:28 PM	PH3 MFC set to  0.000000
7/2/2012	9:09:28 PM	SiCl4 MFC set to  50.000000
7/2/2012	9:09:28 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	9:09:28 PM	Tube furnace set to 1000
7/2/2012	9:37:28 PM	Helium valve closed
7/2/2012	9:37:28 PM	BCl3 valve closed
7/2/2012	9:37:28 PM	PH3 valve closed
7/2/2012	9:37:28 PM	SiCl4 pre valve closed
7/2/2012	9:37:28 PM	SiCl4 post valve closed
7/2/2012	9:37:28 PM	Main Vac valve closed
7/2/2012	9:37:28 PM	Bypass valve closed
7/2/2012	9:37:28 PM	H2 valve opened
7/2/2012	9:37:28 PM	Bubbler valve opened
7/2/2012	9:37:28 PM	Helium MFC set to  0.000000
7/2/2012	9:37:28 PM	H2 MFC set to  500.000000
7/2/2012	9:37:28 PM	BCl3 MFC set to  0.000000
7/2/2012	9:37:28 PM	PH3 MFC set to  0.000000
7/2/2012	9:37:28 PM	SiCl4 MFC set to  0.000000
7/2/2012	9:37:28 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	9:37:28 PM	Tube furnace set to 750
7/2/2012	9:52:28 PM	H2 valve closed
7/2/2012	9:52:28 PM	BCl3 valve closed
7/2/2012	9:52:28 PM	PH3 valve closed
7/2/2012	9:52:28 PM	SiCl4 pre valve closed
7/2/2012	9:52:28 PM	SiCl4 post valve closed
7/2/2012	9:52:28 PM	Main Vac valve closed
7/2/2012	9:52:28 PM	Bypass valve closed
7/2/2012	9:52:28 PM	Helium valve opened
7/2/2012	9:52:28 PM	Bubbler valve opened
7/2/2012	9:52:28 PM	Helium MFC set to  500.000000
7/2/2012	9:52:28 PM	H2 MFC set to  0.000000
7/2/2012	9:52:28 PM	BCl3 MFC set to  0.000000
7/2/2012	9:52:28 PM	PH3 MFC set to  0.000000
7/2/2012	9:52:28 PM	SiCl4 MFC set to  0.000000
7/2/2012	9:52:28 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	9:52:28 PM	Tube furnace set to 0
7/2/2012	10:12:28 PM	Helium valve closed
7/2/2012	10:12:28 PM	H2 valve closed
7/2/2012	10:12:28 PM	BCl3 valve closed
7/2/2012	10:12:28 PM	PH3 valve closed
7/2/2012	10:12:28 PM	SiCl4 pre valve closed
7/2/2012	10:12:28 PM	SiCl4 post valve closed
7/2/2012	10:12:28 PM	Main Vac valve closed
7/2/2012	10:12:28 PM	Bypass valve closed
7/2/2012	10:12:28 PM	Bubbler valve closed
7/2/2012	10:12:28 PM	Helium MFC set to  0.000000
7/2/2012	10:12:28 PM	H2 MFC set to  0.000000
7/2/2012	10:12:28 PM	BCl3 MFC set to  0.000000
7/2/2012	10:12:28 PM	PH3 MFC set to  0.000000
7/2/2012	10:12:28 PM	SiCl4 MFC set to  0.000000
7/2/2012	10:12:28 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	10:12:29 PM	Tube furnace set to 0
7/2/2012	10:14:29 PM	Helium valve closed
7/2/2012	10:14:29 PM	H2 valve closed
7/2/2012	10:14:29 PM	BCl3 valve closed
7/2/2012	10:14:29 PM	PH3 valve closed
7/2/2012	10:14:29 PM	SiCl4 pre valve closed
7/2/2012	10:14:29 PM	SiCl4 post valve closed
7/2/2012	10:14:29 PM	Main Vac valve closed
7/2/2012	10:14:29 PM	Bubbler valve closed
7/2/2012	10:14:29 PM	Bypass valve opened
7/2/2012	10:14:29 PM	Helium MFC set to  0.000000
7/2/2012	10:14:29 PM	H2 MFC set to  0.000000
7/2/2012	10:14:29 PM	BCl3 MFC set to  0.000000
7/2/2012	10:14:29 PM	PH3 MFC set to  0.000000
7/2/2012	10:14:29 PM	SiCl4 MFC set to  0.000000
7/2/2012	10:14:29 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	10:14:29 PM	Tube furnace set to 0
7/2/2012	10:15:18 PM	Helium valve closed
7/2/2012	10:15:18 PM	H2 valve closed
7/2/2012	10:15:18 PM	BCl3 valve closed
7/2/2012	10:15:18 PM	PH3 valve closed
7/2/2012	10:15:18 PM	SiCl4 pre valve closed
7/2/2012	10:15:18 PM	SiCl4 post valve closed
7/2/2012	10:15:18 PM	Main Vac valve closed
7/2/2012	10:15:18 PM	Bubbler valve closed
7/2/2012	10:15:18 PM	Bypass valve opened
7/2/2012	10:15:18 PM	Helium MFC set to  0.000000
7/2/2012	10:15:18 PM	H2 MFC set to  0.000000
7/2/2012	10:15:18 PM	BCl3 MFC set to  0.000000
7/2/2012	10:15:18 PM	PH3 MFC set to  0.000000
7/2/2012	10:15:18 PM	SiCl4 MFC set to  0.000000
7/2/2012	10:15:18 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	10:15:18 PM	Tube furnace set to 0
7/2/2012	10:16:18 PM	Helium valve closed
7/2/2012	10:16:18 PM	H2 valve closed
7/2/2012	10:16:18 PM	BCl3 valve closed
7/2/2012	10:16:18 PM	PH3 valve closed
7/2/2012	10:16:18 PM	SiCl4 pre valve closed
7/2/2012	10:16:18 PM	SiCl4 post valve closed
7/2/2012	10:16:18 PM	Bypass valve closed
7/2/2012	10:16:18 PM	Bubbler valve closed
7/2/2012	10:16:18 PM	Main Vac valve opened
7/2/2012	10:16:18 PM	Helium MFC set to  0.000000
7/2/2012	10:16:18 PM	H2 MFC set to  0.000000
7/2/2012	10:16:18 PM	BCl3 MFC set to  0.000000
7/2/2012	10:16:18 PM	PH3 MFC set to  0.000000
7/2/2012	10:16:18 PM	SiCl4 MFC set to  0.000000
7/2/2012	10:16:18 PM	Bypass solenoid MFC set to  0.000000
7/2/2012	10:16:18 PM	Tube furnace set to 0
7/2/2012	11:16:19 PM	Run finished at 11:16 PM
